Spattering target made of molybdenum
Molybdenum spattering target possesses unique mechanical strength, refractory quality, and corrosion resistance. Molybdenum spattering target cannot be fractured in aggressive liquid and gaseous environment. It has high module of elasticity and low thermal coefficient of lineal expansion. These properties allow using molybdenum target in the most responsible and complex technological manufacturing conditions. Molybdenum spattering targets are more lightweight than tungsten almost twice. That is why molybdenum products have a higher strength-to-density ratio (at a temperature of not more than 1370°С). Virtually the only one demerit is high self-cost of molybdenum target, as long as molybdenum relates to rare-earth elements and it is hardly isolated in a pure state. Besides, it is refractory and hardly processed metal.
|Temperature of characteristic receiving in °С||20°С|
|Coefficient of linear thermal expansion α [1/°С]||4.9x10-6|
|Specific heat at 20 °C [J/(kg/deg)]||0.256|
|Heat conductivity K [V/m*K]||142|
|Specific electric resistance R Оhm-mm2/m||0.054|
Molybdenum reacts with salt, sulfuric acids only at a temperature of 80−100°C. Nitric, chloronitric acids dissolve molybdenum only at a temperature of 100 °C. It is resistant in cold alkali solutions, but it slowly fractures in hot alkali solutions. Additives of carbon, oxygen, silicon, aluminium, nitrogen, iron, sulfur, calcium and phosphorus that are included in commercial molybdenum significantly increase molybdenum properties. The main part of these additives makes molybdenum more brittle. The most detrimental additive is oxygen. If it constitutes 0.0008−0.004%, easy-melting oxides can lead to sharp increase of material brittleness and decrease of metal flow qualities (especially if there are present carbon and nitric). With increasing of oxygen percentage (more than 0.015%), molybdenum becomes brittle and cannot be pressure treated.
Molybdenum spattering targets are made in the forms of flat plates, disks or tubes with a help of electric-beam and zoning melting. Molybdenum spattering targets can be made of any size and configuration with tolerances according to customer’s drawing.
Molybdenum spattering targets — foreign analogs (the USA):
Mo, TZC, TM, TZM, Mo-50Re, WM, MoZrTi0.3−0.2, MoZrTi0.5−1.
Maximum size of flat molybdenum target, mm:
— rectangular target: 400x1550;
— disk-shaped targets, diameter is 630;
Application of molybdenum spattering targets
Molybdenum targets are used during filming process on optical apparatus glasses, solar battery etc.
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